Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces

A method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces is provided. The apparatus may comprise a graphite susceptor disposed within a vessel. Porous structures may be stacked within the graphite susceptor. The stack of porous structures may form a circular shape pr...

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1. Verfasser: Rudolph, James W
Format: Patent
Sprache:eng
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Zusammenfassung:A method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces is provided. The apparatus may comprise a graphite susceptor disposed within a vessel. Porous structures may be stacked within the graphite susceptor. The stack of porous structures may form a circular shape proximate a radially inward surface of the graphite susceptor. Graphite panels may be disposed within the graphite susceptor. The graphite panels may be located proximate a radially inward surface of the porous structures. The graphite panels may radiate heat radially outward and towards the graphite susceptor. Reactant gas may be flowed into the graphite susceptor.