System and method of controlling a robot

A system for controlling a robot moving vertically and horizontally using a motor is provided. The system includes a detector suitable for generating a feedback signal by detecting physical status of the motor; and a controller suitable for detecting loading of a substrate on the robot based on the...

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Bibliographische Detailangaben
Hauptverfasser: Kim, Yun Il, Seok, Dong Ju, Lee, Sang Tae
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A system for controlling a robot moving vertically and horizontally using a motor is provided. The system includes a detector suitable for generating a feedback signal by detecting physical status of the motor; and a controller suitable for detecting loading of a substrate on the robot based on the feedback signal during a vertical moving interval of the robot, and generating a control command in accordance with the detection of the loading of the substrate.