Semiconductor device including a heat sink structure

A semiconductor device includes a drift structure formed in a semiconductor body. The drift structure forms a first pn junction with a body zone of a transistor cell. A gate structure extends from a first surface of the semiconductor body into the drift structure. A heat sink structure extends from...

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Bibliographische Detailangaben
Hauptverfasser: Ruhl, Guenther, Laven, Johannes Georg, Mahler, Joachim, Irsigler, Peter, Schulze, Hans-Joachim, Zundel, Markus
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device includes a drift structure formed in a semiconductor body. The drift structure forms a first pn junction with a body zone of a transistor cell. A gate structure extends from a first surface of the semiconductor body into the drift structure. A heat sink structure extends from the first surface into the drift structure. A thermal conductivity of the heat sink structure is greater than a thermal conductivity of the gate structure and/or a thermal capacity of the heat sink structure is greater than a thermal capacity of the gate structure.