Selective gate spacers for semiconductor devices

Techniques related to forming selective gate spacers for semiconductor devices and transistor structures and devices formed using such techniques are discussed. Such techniques include forming a blocking material on a semiconductor fin, disposing a gate having a different surface chemistry than the...

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Bibliographische Detailangaben
Hauptverfasser: Gstrein, Florian, Hourani, Rami, Romero, Patricio E, Liao, Szuya S, Clendenning, Scott B, Kloster, Grant M, Mitan, Martin M
Format: Patent
Sprache:eng
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Zusammenfassung:Techniques related to forming selective gate spacers for semiconductor devices and transistor structures and devices formed using such techniques are discussed. Such techniques include forming a blocking material on a semiconductor fin, disposing a gate having a different surface chemistry than the blocking material on a portion of the blocking material, forming a selective conformal layer on the gate but not on a portion of the blocking material, and removing exposed portions of the blocking material.