Radiation source and lithographic apparatus

A radiation source comprising a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface provided with a plurality of grooves. The grooves have orientations which are arranged to dir...

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Bibliographische Detailangaben
Hauptverfasser:	Van Der Straaten, Gerrit, Badie, Ramin, Mestrom, Wilbert Jan, Kampinga, Wim Ronald, Schimmel, Hendrikus Gijsbertus, Labetski, Dzmitry, Brinkert, Jacob, Jilisen, Reinier Theodorus Martinus, Virgo, Brian Vernon, Ten Kate, Nicolaas, Paulussen, Dennis Jozef Maria, Riepen, Michel, Nieuwenkamp, Jan Okke, Van Putten, Peter, Castelijns, Henricus Jozef, Jansen, Hans, Rijpma, Albert Pieter, Franken, Johannes Christiaan Leonardus
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOWOF GASES OR LIQUIDS FLUID-PRESSURE ACTUATORS GAMMA RAY OR X-RAY MICROSCOPES HEATING HOLOGRAPHY HYDRAULICS OR PNEUMATICS IN GENERAL IRRADIATION DEVICES LIGHTING MATERIALS THEREFOR MECHANICAL ENGINEERING NUCLEAR ENGINEERING NUCLEAR PHYSICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR WEAPONS X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	A radiation source comprising a fuel source configured to deliver fuel to a location from which the fuel emits EUV radiation. The radiation source further comprises an immobile fuel debris receiving surface provided with a plurality of grooves. The grooves have orientations which are arranged to direct the flow of liquid fuel under the influence of gravity in one or more desired directions.