Nanoporous silicon nitride membranes, and methods for making and using such membranes

Provided are nanoporous silicon nitride membranes and methods of making such membranes. The membranes can be part of a monolithic structure or free-standing. The membranes can be made by transfer of the nanoporous structure of a nanoporous silicon or silicon oxide film by, for example, reactive ion...

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Bibliographische Detailangaben
Hauptverfasser:	DesOrmeaux, Jon-Paul, Striemer, Christopher C
Format:	Patent
Sprache:	eng
Schlagworte:	DECORATIVE ARTS DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY HUMAN NECESSITIES HYGIENE MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEDICAL OR VETERINARY SCIENCE MOSAICS NANOTECHNOLOGY PAPERHANGING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PRODUCING DECORATIVE EFFECTS SEPARATION SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TARSIA WORK TRANSPORTING
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Beschreibung
Zusammenfassung:	Provided are nanoporous silicon nitride membranes and methods of making such membranes. The membranes can be part of a monolithic structure or free-standing. The membranes can be made by transfer of the nanoporous structure of a nanoporous silicon or silicon oxide film by, for example, reactive ion etching. The membranes can be used in, for example, filtration applications, hemodialysis applications, hemodialysis devices, laboratory separation devices, multi-well cell culture devices, electronic biosensors, optical biosensors, active pre-concentration filters for microfluidic devices.