Semiconductor devices and methods for manufacturing the same

A semiconductor device includes a semiconductor substrate having a first conductivity type, wherein the semiconductor substrate includes a first region and a second region. The semiconductor device also includes a buried layer disposed in the first region of the semiconductor substrate and having th...

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Bibliographische Detailangaben
Hauptverfasser: Lin, Shin-Cheng, Ho, Yu-Hao, Chiu, Chien-Wei
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device includes a semiconductor substrate having a first conductivity type, wherein the semiconductor substrate includes a first region and a second region. The semiconductor device also includes a buried layer disposed in the first region of the semiconductor substrate and having the first conductivity type, wherein the buried layer has a dopant concentration that is greater than that of the semiconductor substrate. The semiconductor device further includes an epitaxial layer disposed on the semiconductor substrate, and a first element disposed on the first region of the semiconductor substrate, wherein the first element includes a bipolar-complementary metal oxide semiconductor (CMOS)-double diffused metal oxide semiconductor (DMOS) (BCD) transistor. In addition, the semiconductor device includes a second element disposed on the second region of the semiconductor substrate, wherein the second element includes an ultra-high voltage (UHV) transistor.