Method for producing a sensor element by means of laser structuring

In order to produce accurate sensor element in a simple way, the invention provides a method for producing a sensor element (10) for a pressure or force sensor. Steps include, providing a component (13) to be deformed. Applying to the component (13), a sensor function and contact layer (24) consisti...

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Bibliographische Detailangaben
Hauptverfasser:	Koch, Jurgen, Suttmann, Oliver, Siber, Armin, Zeisel, Dieter, Broetzmann, Marc, Dusing, Jan
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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Beschreibung
Zusammenfassung:	In order to produce accurate sensor element in a simple way, the invention provides a method for producing a sensor element (10) for a pressure or force sensor. Steps include, providing a component (13) to be deformed. Applying to the component (13), a sensor function and contact layer (24) consisting of a material with a k-factor between 2 and 10. Performing planar ablation of the material of the sensor function and contact layer (24) by means of a laser, in such a manner that strain gauges (44) with a resistance structure with a meandering shape and contact pads (46.1, 46.2, 46.3, 46.4) remain standing.