BAW sensor with passive mixing structures

A fluidic device includes a base structure, a wall structure, and a cover structure bounding a fluidic passage containing a functionalized active region of at least one bulk acoustic wave (BAW) resonator structure. One or more of the wall structure, the cover structure, or a portion of the base stru...

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Bibliographische Detailangaben
1. Verfasser:	Rivas, Rio
Format:	Patent
Sprache:	eng
Schlagworte:	ADDITIVE MANUFACTURING TECHNOLOGY ADDITIVE MANUFACTURING, i.e. MANUFACTURING OFTHREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVEAGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING,STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A fluidic device includes a base structure, a wall structure, and a cover structure bounding a fluidic passage containing a functionalized active region of at least one bulk acoustic wave (BAW) resonator structure. One or more of the wall structure, the cover structure, or a portion of the base structure includes multiple features (e.g., protrusions and/or recesses) configured to interact with fluid flowing within the fluidic passage to promote mixing between constituents of the fluid. Methods for fabricating a fluidic device, as well as methods for biological or chemical sensing using a fluidic device, are further provided.