Vertical non-volatile memory device and method for fabricating the same

A vertical non-volatile memory device includes a substrate including a cell region; a lower insulating layer on the substrate; a lower wiring pattern in the cell region having a predetermined pattern and connected to the substrate through the lower insulating layer; and a plurality of vertical chann...

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Bibliographische Detailangaben
Hauptverfasser: Kang, Shin-hwan, Kanamori, Kohji, Kim, Kwang-soo, Jang, Jae-hoon, Lee, Jae-duk, Lee, Heon-kyu
Format: Patent
Sprache:eng
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Zusammenfassung:A vertical non-volatile memory device includes a substrate including a cell region; a lower insulating layer on the substrate; a lower wiring pattern in the cell region having a predetermined pattern and connected to the substrate through the lower insulating layer; and a plurality of vertical channel layers extending in a vertical direction with respect to a top surface of the substrate in the cell region, spaced apart from one another in a horizontal direction with respect to the top surface of the substrate, and electrically connected to the lower wiring pattern. The memory device also includes a plurality of gate electrodes stacked alternately with interlayer insulating layers in the cell region in the vertical direction along a side wall of a vertical channel layer and formed to extend in a first direction along the horizontal direction.