Semiconductor wire bonding machine cleaning device and method

A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material may include a cleaning pad layer and one...

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Bibliographische Detailangaben
Hauptverfasser: Smith, Wayne C, Humphrey, Alan E, Shivlal, Janakraj, Humphrey, Bret A
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A methodology and medium for regular and predictable cleaning the support hardware such as capillary tube in semiconductor assembly equipment components, while it is still in manual, semi-automated, and automated assembly are disclosed. The cleaning material may include a cleaning pad layer and one or more intermediate layers that have predetermined characteristics.