Method and apparatus for metering and vaporizing a fluid
A vaporization device, including a fluid supply containing a vaporizable fluid; a plurality of bubble pumps operative to pump fluid from the fluid supply to outlets of the bubble pumps; and a fluid vaporization heater located adjacent the outlets of the bubble pumps to receive fluid from the bubble...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A vaporization device, including a fluid supply containing a vaporizable fluid; a plurality of bubble pumps operative to pump fluid from the fluid supply to outlets of the bubble pumps; and a fluid vaporization heater located adjacent the outlets of the bubble pumps to receive fluid from the bubble pumps. |
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