Method and apparatus for metering and vaporizing a fluid

A vaporization device, including a fluid supply containing a vaporizable fluid; a plurality of bubble pumps operative to pump fluid from the fluid supply to outlets of the bubble pumps; and a fluid vaporization heater located adjacent the outlets of the bubble pumps to receive fluid from the bubble...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Barkley, Lucas D
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A vaporization device, including a fluid supply containing a vaporizable fluid; a plurality of bubble pumps operative to pump fluid from the fluid supply to outlets of the bubble pumps; and a fluid vaporization heater located adjacent the outlets of the bubble pumps to receive fluid from the bubble pumps.