Method and apparatus for metering and vaporizing a fluid

A vaporization device, including a fluid supply containing a vaporizable fluid; a bubble pump operative to pump fluid from the fluid supply to an outlet of the bubble pump; and a fluid vaporization heater located adjacent the outlet of the bubble pump to receive fluid from the bubble pump.

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Bibliographische Detailangaben
1. Verfasser: Barkley, Lucas D
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A vaporization device, including a fluid supply containing a vaporizable fluid; a bubble pump operative to pump fluid from the fluid supply to an outlet of the bubble pump; and a fluid vaporization heater located adjacent the outlet of the bubble pump to receive fluid from the bubble pump.