Bonding structure and method for producing bonding structure

A bonding structure (100) of the present invention includes a substrate (110), a metal film (120), a semiconductor element (130). The substrate (110), the metal film (120), and the semiconductor element (130) are laminated in order just mentioned. The metal film (120) contains a metal diffused throu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Nagao, Shijo, Oh, Chulmin, Suganuma, Katsuaki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A bonding structure (100) of the present invention includes a substrate (110), a metal film (120), a semiconductor element (130). The substrate (110), the metal film (120), and the semiconductor element (130) are laminated in order just mentioned. The metal film (120) contains a metal diffused through stress migration, and the substrate (110) and the semiconductor element (130) are bonded together with the metal film (120) therebetween.