Method and device for imaging an object
At least two images (201-1-201-3) of an object (100) are obtained, wherein each image has an illumination field (110-1-110-3) associated therewith, which is associated with predetermined beam shape properties (111-1-111-3). For each one of the at least two images (201-1-201-3) an effect of the beam...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | At least two images (201-1-201-3) of an object (100) are obtained, wherein each image has an illumination field (110-1-110-3) associated therewith, which is associated with predetermined beam shape properties (111-1-111-3). For each one of the at least two images (201-1-201-3) an effect of the beam shape properties is added to a predetermined approximation of the object, the approximation is adjusted by means of Fourier ptychography techniques on the basis of the respective image and then the effect of the beam shape properties is removed from the adapted approximation of the object. |
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