Optical three-dimensional shape measuring device

Provided is a measuring device having improved operability. A head unit is fixedly coupled to an installation part with a stand. A measuring object is placed on a stage held by the installation part. The measuring object is irradiated obliquely downward with the measurement light having the pattern...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Fujiwara, Masaki, Nakatsukasa, Takashi, Murakami, Shigeto
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION TESTING
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Beschreibung
Zusammenfassung:	Provided is a measuring device having improved operability. A head unit is fixedly coupled to an installation part with a stand. A measuring object is placed on a stage held by the installation part. The measuring object is irradiated obliquely downward with the measurement light having the pattern from the light projecting unit. The measurement light reflected obliquely upward by the measuring object is received by a selected one of first and second light receiving units, and a light reception signal representing a light reception amount is output. A second imaging visual field of the second light receiving unit is smaller than a first imaging visual field of the first light receiving unit, and included in the first imaging visual field. A second optical axis of the second light receiving unit is located below a first optical axis of the first light receiving unit.