Semiconductor device and bump formation process

A semiconductor device includes a semiconductor substrate. A pad region is disposed on the semiconductor substrate. A micro bump is disposed on the pad region. The micro bump has a first portion on the pad region and a second portion on the first portion. The first portion and the second portion hav...

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Bibliographische Detailangaben
Hauptverfasser: Wu, Kai-Di, Kuo, Chien-Hung, Lii, Mirng-Ji, Wang, Chao-Yi, Wu, Sheng-Yu, Chiu, Chun-Mao, Huang, Hon-Lin, Chen, Ching-Hui, Wang, Zi-Zhong
Format: Patent
Sprache:eng
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