Method and apparatus for processing process-environment-sensitive material
A disclosed method includes serially moving a plurality of dies through a series of interconnected chambers that are selectively sealable from each other. Through the series of interconnected chambers, each of the dies is introduced into a controlled gas environment, each of the dies is introduced i...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A disclosed method includes serially moving a plurality of dies through a series of interconnected chambers that are selectively sealable from each other. Through the series of interconnected chambers, each of the dies is introduced into a controlled gas environment, each of the dies is introduced into a controlled temperature environment, a process-environment-sensitive material is pressurized in each of the dies, and each of the dies is cooled. A disclosed apparatus includes a series of interconnected chambers that are selectively sealable from each other. A first one of the chambers is configured to establish a controlled gas environment therein, a second one of the chambers is configured to establish a controlled temperature environment therein, a third one of the chambers is configured to pressurize a process-environment-sensitive material and a fourth one of the chambers is configured to cool the process-environment-sensitive material. |
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