Fin diode structure and methods thereof

A method and structure for forming a fin bottom diode includes providing a substrate having a plurality of fins extending therefrom. Each of the plurality of fins includes a substrate portion and an epitaxial layer portion over the substrate portion. A first dopant layer is formed on sidewalls of a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Chou, You-Hua
Format: Patent
Sprache:eng
Schlagworte:
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