Micromechanical device including a movable element having a laser disposed thereon
A micromechanical device is described as having a stationary element (100) and a deflectable element. The invention relates to a light source that is situated on the deflectable element. Also described is a micromechanical scanner including a micromechanical device having a movable element with a li...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A micromechanical device is described as having a stationary element (100) and a deflectable element. The invention relates to a light source that is situated on the deflectable element. Also described is a micromechanical scanner including a micromechanical device having a movable element with a light source disposed thereon. |
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