Co-finishing surfaces

A method for co-finishing surfaces bonds a first structure formed of a first material and having a first surface in an aperture defined in a second structure formed of a second material and having a second surface such that there is an offset between the first surface and the second surface. The fir...

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Bibliographische Detailangaben
Hauptverfasser: Yi, Bin, Nathanson, Scott M, Ness, Trevor J, Nazzaro, David I, Manjunathaiah, Jairam, Matsuyuki, Naoto, Qu, Dezheng, Molina, Raul A
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method for co-finishing surfaces bonds a first structure formed of a first material and having a first surface in an aperture defined in a second structure formed of a second material and having a second surface such that there is an offset between the first surface and the second surface. The first surface and the second surface are co-lapped to reduce the offset. The first surface and second surface are co-polished to further reduce the offset. The first surface and second surfaces may then be flush. Edges of the first surface may be chamfered to mitigate damage during co-lapping and/or co-polishing. Fill material may be positioned in gaps between the first and second structures to mitigate damage during co-lapping and/or co-polishing.