Piezoelectric film, piezoelectric film element, piezoelectric actuator, piezoelectric sensor, hard-disk drive and ink jet printer head

A piezoelectric film containing (K,Na)NbO3 as the main component, wherein, when a surface of the piezoelectric film was observed in a field view within a specified range, a plurality of first crystals and a plurality of second crystals are arranged in the surface of the piezoelectric film, wherein,...

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Bibliographische Detailangaben
Hauptverfasser: Ootsuki, Shirou, Hirose, Yuiko
Format: Patent
Sprache:eng
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Zusammenfassung:A piezoelectric film containing (K,Na)NbO3 as the main component, wherein, when a surface of the piezoelectric film was observed in a field view within a specified range, a plurality of first crystals and a plurality of second crystals are arranged in the surface of the piezoelectric film, wherein, the first crystal has a slender shape orientating toward the first orientation along the surface, and the second crystal has a slender shape orientating toward the second orientation which crosses with the first orientation along the surface.