Vapor deposition device and method for producing organic EL display device

On a vapor deposition target surface of a vapor deposition target substrate placed on a substrate tray in a vapor deposition device, display regions on which vapor deposition particles are to be deposited are arranged in alignment to be apart from each other in a direction parallel with a scanning d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kawato, Shinichi, Kobayashi, Yuhki, Inoue, Satoshi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:On a vapor deposition target surface of a vapor deposition target substrate placed on a substrate tray in a vapor deposition device, display regions on which vapor deposition particles are to be deposited are arranged in alignment to be apart from each other in a direction parallel with a scanning direction, and the substrate tray includes a blocking part configured to block the vapor deposition particles to be deposited onto regions adjacent to the display regions in a direction parallel with the scanning direction. This prevents a degree of freedom in designing of the vapor deposition target substrate from being restricted even in performing scan vapor deposition.