Piezoelectric drive device, robot, and drive method thereof

A piezoelectric drive device includes a vibrating plate and multiple piezoelectric drive units that are disposed in the vibrating plate, and that respectively have a contact portion which can come into contact with a driven body.

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Bibliographische Detailangaben
1. Verfasser: Miyazawa, Osamu
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A piezoelectric drive device includes a vibrating plate and multiple piezoelectric drive units that are disposed in the vibrating plate, and that respectively have a contact portion which can come into contact with a driven body.