Piezoelectric drive device, robot, and drive method thereof
A piezoelectric drive device includes a vibrating plate and multiple piezoelectric drive units that are disposed in the vibrating plate, and that respectively have a contact portion which can come into contact with a driven body.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A piezoelectric drive device includes a vibrating plate and multiple piezoelectric drive units that are disposed in the vibrating plate, and that respectively have a contact portion which can come into contact with a driven body. |
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