Fixture to support reel-to-reel inspection of semiconductor devices or other components

A system includes a component inspection system having a radiation source configured to generate radiation and a radiation detector configured to detect the radiation after the radiation passes through components to be inspected. The system also includes a fixture configured to receive multiple reel...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Fasolino, Stephen T, Wheeler, Jason L, Ng, Joshua
Format:	Patent
Sprache:	eng
Schlagworte:	CONVEYING DETECTING MASSES OR OBJECTS GEOPHYSICS GRAVITATIONAL MEASUREMENTS HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PACKING PERFORMING OPERATIONS PHYSICS STORING TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A system includes a component inspection system having a radiation source configured to generate radiation and a radiation detector configured to detect the radiation after the radiation passes through components to be inspected. The system also includes a fixture configured to receive multiple reels that are each configured to receive a tape in or on which the components are located. The fixture includes a base configured to be secured to a support, a shaft, one or more motors mounted to the shaft and configured to rotate the reels, and one or more joints coupling the shaft and base. The one or more joints are configured to allow (i) rotation of the shaft about a longitudinal axis of the shaft to change an orientation of the shaft with respect to the base and (ii) rotation of the shaft to change a direction at which the shaft extends away from the base.