Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

In one embodiment, a semiconductor manufacturing apparatus includes a support module configured to support a wafer having first and second faces. The apparatus further includes a chamber configured to contain the support module. The apparatus further includes a microwave generator configured to gene...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Suguro, Kyoichi
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC HEATING
ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:In one embodiment, a semiconductor manufacturing apparatus includes a support module configured to support a wafer having first and second faces. The apparatus further includes a chamber configured to contain the support module. The apparatus further includes a microwave generator configured to generate a microwave. The apparatus further includes a waveguide configured to emit the microwave into the chamber to irradiate the first or second face of the wafer with the microwave, the waveguide being provided to the chamber such that an incidence direction of the microwave emitted from the waveguide onto the first or second face is non-vertical to the first or second face.