Multi-element sensor array calibration method

A method of calibrating a sensor array having elements spaced from one another in a first direction, the array defining an array spatial response function, includes: providing a test workpiece having at least first and second calibrated defects spaced apart in the first direction by a characteristic...

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Bibliographische Detailangaben
Hauptverfasser: Hughes, Robert R, Lane, Christopher J L
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of calibrating a sensor array having elements spaced from one another in a first direction, the array defining an array spatial response function, includes: providing a test workpiece having at least first and second calibrated defects spaced apart in the first direction by a characteristic distance such that when the first calibrated surface defect is located at a position corresponding to an array response function maximum, the second calibrated surface defect is located at a position corresponding to an array response function minimum; passing the array across the first and second calibrated surface defects in a direction normal to the first direction and determining a peak sensor signal from at least two of the elements in the array to determine an array spatial response function root mean squared average; and setting a rejection threshold as a predetermined proportion of the array spatial response function root mean squared average.