Imprint apparatus and imprint method

An imprint apparatus according to one embodiment includes a contact processing unit and a defect determination unit. The contact processing unit brings a template pattern formed on a front surface of a template into contact with resist placed on a substrate. The defect determination unit determines...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hiroshima, Masahito, Nomura, Hiroshi, Matsuoka, Yasuo
Format:	Patent
Sprache:	eng
Schlagworte:	LINING MACHINES PERFORMING OPERATIONS PRINTING PRINTING MACHINES OR PRESSES STAMPS TRANSPORTING TYPEWRITERS
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