Imprint apparatus and imprint method

Imprint apparatus and imprint method

An imprint apparatus according to one embodiment includes a contact processing unit and a defect determination unit. The contact processing unit brings a template pattern formed on a front surface of a template into contact with resist placed on a substrate. The defect determination unit determines...

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Hauptverfasser: Hiroshima, Masahito, Nomura, Hiroshi, Matsuoka, Yasuo
Format: Patent
Sprache:eng
Schlagworte:
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
PRINTING MACHINES OR PRESSES
STAMPS
TRANSPORTING
TYPEWRITERS
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creator Hiroshima, Masahito
Nomura, Hiroshi
Matsuoka, Yasuo
description An imprint apparatus according to one embodiment includes a contact processing unit and a defect determination unit. The contact processing unit brings a template pattern formed on a front surface of a template into contact with resist placed on a substrate. The defect determination unit determines a defect in an imprint process, on the basis of force which is generated from at least one of the template, the resist, and the substrate, during the imprint process.
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The contact processing unit brings a template pattern formed on a front surface of a template into contact with resist placed on a substrate. 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The contact processing unit brings a template pattern formed on a front surface of a template into contact with resist placed on a substrate. The defect determination unit determines a defect in an imprint process, on the basis of force which is generated from at least one of the template, the resist, and the substrate, during the imprint process.</abstract><oa>free_for_read</oa></addata></record>
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subjects LINING MACHINES
PERFORMING OPERATIONS
PRINTING
PRINTING MACHINES OR PRESSES
STAMPS
TRANSPORTING
TYPEWRITERS
title Imprint apparatus and imprint method
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