Sealing sheet with separators on both surfaces, and method for manufacturing semiconductor device

A sealing sheet with separators on both surfaces is provided with a sealing sheet, a separator (A) stacked on one surface of the sealing sheet and having a thickness of 50 μm or more, and a separator (B) stacked on the other surface of the sealing sheet.

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Bibliographische Detailangaben
Hauptverfasser: Ishizaka, Tsuyoshi, Morita, Kosuke, Shiga, Goji, Iino, Chie
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A sealing sheet with separators on both surfaces is provided with a sealing sheet, a separator (A) stacked on one surface of the sealing sheet and having a thickness of 50 μm or more, and a separator (B) stacked on the other surface of the sealing sheet.