Integrated magnetic random access memory with logic device

Integrating magnetic random access memory with logic is disclosed. The magnetic tunnel junction stack of a magnetic memory cell is disposed within a dielectric layer which serves as a via level of an interlevel dielectric layer with a metal level above the via level. An integration scheme for formin...

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Bibliographische Detailangaben
Hauptverfasser: Poh, Francis, Wang, Daxiang, Jiang, Yi, Zhang, Fan, Shum, Danny Pak-Chum, Tan, Juan Boon
Format: Patent
Sprache:eng
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Zusammenfassung:Integrating magnetic random access memory with logic is disclosed. The magnetic tunnel junction stack of a magnetic memory cell is disposed within a dielectric layer which serves as a via level of an interlevel dielectric layer with a metal level above the via level. An integration scheme for forming dual damascene structures for interconnects can be formed to logic and memory cells easily.