In-band beating removal for a MEMS gyroscope

Vibration gyroscope circuitry, connectable to a vibrating MEMS gyroscope, includes drive circuitry for driving the gyroscope and a measurement circuit for providing a drive measurement signal indicating displacement of a mass along a drive axis. Sense circuitry processes a sense measurement signal o...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Beaulaton, Hugues, Cornibert, Laurent, Cassagnes, Thierry, Teo, Yean Ling
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Vibration gyroscope circuitry, connectable to a vibrating MEMS gyroscope, includes drive circuitry for driving the gyroscope and a measurement circuit for providing a drive measurement signal indicating displacement of a mass along a drive axis. Sense circuitry processes a sense measurement signal of the gyroscope indicating displacement of the mass along a sense axis. A digital sample clock generator includes an oscillator for generating a master clock, a counter for counting master clock periods during one period of an input signal derived from the drive measurement signal, and a number count monitor for determining during how many input signal periods the number count stays constant and for comparing a number of constant periods with a critical number of constant periods. A frequency shifter triggers the oscillator to shift the master clock frequency whenever the monitor determines that the number of constant periods exceeds the critical number of constant periods.