Slit valve assembly having a spacer for maintaining a gap

A spacer for maintaining a gap between a slit valve door and a sealing surface of a slit valve body. The spacer may be located on an outer ambient side of the slit valve away from any corrosive gasses that may exist in the chamber. The spacer may be attached to the slit valve door partially in a dep...

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Bibliographische Detailangaben
Hauptverfasser:	Coppola, Stephen, Kamibayashiyama, Julian
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BLASTING COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING TAPS THERMAL INSULATION IN GENERAL VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A spacer for maintaining a gap between a slit valve door and a sealing surface of a slit valve body. The spacer may be located on an outer ambient side of the slit valve away from any corrosive gasses that may exist in the chamber. The spacer may be attached to the slit valve door partially in a depression therein, and may be integral with the seal.