Valve, fluid control structure, fluid device and method of manufacturing valve

A valve disposed at a flow path includes: a substrate having a first surface in which a hole having an opening section is formed; and a diaphragm member fixed to at least part of a wall surface of the hole and in which at least a central portion has a thin film shape, wherein a flow of a fluid in th...

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Bibliographische Detailangaben
Hauptverfasser:	Ichiki, Takanori, Terane, Shotaro, Kobayashi, Masashi, Suzuki, Kuno
Format:	Patent
Sprache:	eng
Schlagworte:	ACTUATING-FLOATS BLASTING CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE COCKS COMBINED OPERATIONS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MACHINE TOOLS MECHANICAL ENGINEERING METAL-WORKING NOT OTHERWISE PROVIDED FOR OTHER WORKING OF METAL PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS TAPS THERMAL INSULATION IN GENERAL TRANSPORTING UNIVERSAL MACHINE TOOLS VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A valve disposed at a flow path includes: a substrate having a first surface in which a hole having an opening section is formed; and a diaphragm member fixed to at least part of a wall surface of the hole and in which at least a central portion has a thin film shape, wherein a flow of a fluid in the flow path is controlled by deforming the diaphragm member.