Displacement measuring method and displacement measuring device

A displacement measuring device, comprising a pattern projecting unit, a pattern image pickup unit capable of relatively displacing with respect to the pattern projecting unit and a control unit, wherein the pattern projecting unit projects a displacement detecting pattern to the pattern image picku...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Osaragi, Kazuki, Kumagai, Kaoru, Momiuchi, Masayuki, Ohtomo, Fumio
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS CALCULATING COMPUTING COUNTING HANDLING RECORD CARRIERS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A displacement measuring device, comprising a pattern projecting unit, a pattern image pickup unit capable of relatively displacing with respect to the pattern projecting unit and a control unit, wherein the pattern projecting unit projects a displacement detecting pattern to the pattern image pickup unit, the pattern image pickup unit picks up the displacement detecting pattern as projected, the control unit circulates image of the displacement detecting pattern picked up by the pattern image pickup unit to the pattern projecting unit, updates the displacement detecting pattern projected by the pattern projecting unit to the displacement detecting pattern as circulated, and projects the displacement detecting pattern as updated to the pattern image pickup unit, wherein relative displacement between the pattern projecting unit and the pattern image pickup unit is obtained by dividing a displacement amount of the displacement detecting pattern in the image acquired by circulation by the number of circulations.