Shape measuring device
To provide a shape measuring device capable of measuring a surface shape of a measuring object at high speed and with high accuracy in a wide measurement range while configuring the shape measuring device compact. A movable section 141 and a balancing section 142 are supported by a supporting sectio...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | To provide a shape measuring device capable of measuring a surface shape of a measuring object at high speed and with high accuracy in a wide measurement range while configuring the shape measuring device compact. A movable section 141 and a balancing section 142 are supported by a supporting section 125 and reciprocatingly moved by a driving unit 150 with respect to the supporting section 125 in opposite directions each other. |
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