Sensor, object positioning system, lithographic apparatus and device manufacturing method

A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers ar...

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Bibliographische Detailangaben
Hauptverfasser:	Van Lieshout, Richard Henricus Adrianus, Heeren, Adrianus Marinus Wouter, Cadee, Theodorus Petrus Maria, De Best, Jeroen Johannes Theodorus Hendrikus, Lenssen, Bo, Schellens, Hendrikus Johannes, Van Eijk, Jan, Broers, Sander Christiaan, Van Der Krieken, Peter, Beerens, Ruud Antonius Catharina Maria, Leenknegt, George Alois Leonie, Akkermans, Johannes Antonius Gerardus
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MATERIALS THEREFOR MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.