Angular velocity sensor

Angular velocity sensor

When one direction of plane directions of a substrate is a first direction and a direction of the plane directions of the substrate perpendicular to the first direction is a second direction, a vibrating member is supported at an outer peripheral section via a plurality of beam sections having first...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Jomori, Tomoya, Sakai, Minekazu
Format: Patent
Sprache:eng
Schlagworte:
ELECTRICITY
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Beschreibung
Zusammenfassung:When one direction of plane directions of a substrate is a first direction and a direction of the plane directions of the substrate perpendicular to the first direction is a second direction, a vibrating member is supported at an outer peripheral section via a plurality of beam sections having first beam-configuring members that can displace at least in the first direction and second beam-configuring members that are joined to the first beam-configuring members and that can displace at least in the second direction. In at least a subset of the plurality of beam sections, beam-configuring members on a side of the outer peripheral section among the first beam-configuring members and the second beam-configuring members are integrated with each other.