Semiconductor devices with alignment keys

A semiconductor device includes an alignment key on a substrate. The alignment key includes a first sub-alignment key pattern with a first conductive pattern, a second conductive pattern, and a capping dielectric pattern that are sequentially stacked on the substrate, an alignment key trench that pe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shin, Sooho, Seo, Bumseok, Yoon, Chan-Sic, Kim, Kwangmin, Moon, Ilyoung, Lee, Hoin, Lee, Kiseok, Lee, Jun Ho, Lee, Juik, Park, Jemin
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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