Semiconductor devices with alignment keys

A semiconductor device includes an alignment key on a substrate. The alignment key includes a first sub-alignment key pattern with a first conductive pattern, a second conductive pattern, and a capping dielectric pattern that are sequentially stacked on the substrate, an alignment key trench that pe...

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Bibliographische Detailangaben
Hauptverfasser: Shin, Sooho, Seo, Bumseok, Yoon, Chan-Sic, Kim, Kwangmin, Moon, Ilyoung, Lee, Hoin, Lee, Kiseok, Lee, Jun Ho, Lee, Juik, Park, Jemin
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device includes an alignment key on a substrate. The alignment key includes a first sub-alignment key pattern with a first conductive pattern, a second conductive pattern, and a capping dielectric pattern that are sequentially stacked on the substrate, an alignment key trench that penetrates at least a portion of the first sub-alignment key pattern, and a lower conductive pattern in the alignment key trench. The alignment key trench includes an upper trench that is provided in the capping dielectric pattern that has a first width, and a lower trench that extends downward from the upper trench and that has a second width less than the first width. The lower conductive pattern includes sidewall conductive patterns that are separately disposed on opposite sidewalls of the lower trench.