Methods, apparatus and system for TDDB testing

At least one method and system disclosed herein involves performing a time-dependent dielectric breakdown (TDDB) on a plurality of devices. A first device and a second device are provided for testing. A test signal is provided for performing a time-dependent dielectric breakdown (TDDB) test on the f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Uppal, Suresh
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:At least one method and system disclosed herein involves performing a time-dependent dielectric breakdown (TDDB) on a plurality of devices. A first device and a second device are provided for testing. A test signal is provided for performing a time-dependent dielectric breakdown (TDDB) test on the first and second devices. A selection signal for selecting said first and second devices for performing said TDDB test. The first and second devices are arranged in series with a first resistor such that based upon said selecting, the test signal is applied substantially simultaneously to the first and second devices through the first resistor. A determination is made as to whether a breakdown and/or a failure of at least one of the first and second devices has occurred based upon a change in voltage across the first resistor.