Silicon-containing underlayers

Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si-O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.

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Bibliographische Detailangaben
Hauptverfasser: Yamada, Shintaro, Sullivan, Christopher P, Li, Mingqi, Cameron, James F, Coley, Suzanne M, Ongayi, Owendi, Cui, Li, LaBeaume, Paul J, Cutler, Charlotte A
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si-O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.