MAGNETRON SPRAYING MECHANISM
A magnetron spraying mechanism concerns ion-plasma technology of sputtering thin films and protective coatings in making integrated circuits and electronic devices of functional diagnostics. Magnetron spraying mechanism has two planar magnetic systems with targets, disposed at an angle of 60°-120° a...
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| creator | BEDIUKH OLEKSANDR RADIIOVYCH KUCHERENKO YEVHEN TROKHYMOVYCH KRAVCHENKO OLEKSANDR IVANOVYCH |
| description | A magnetron spraying mechanism concerns ion-plasma technology of sputtering thin films and protective coatings in making integrated circuits and electronic devices of functional diagnostics. Magnetron spraying mechanism has two planar magnetic systems with targets, disposed at an angle of 60°-120° and two power supplies, which are switched in parallel to magnetic systems, one of them is of high frequency and another one is of low frequency. The technical result consists in providing possibility of obtaining films of metal semiconductor and dielectric coatings and two component coatings. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_UA77692C2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>UA77692C2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_UA77692C23</originalsourceid><addsrcrecordid>eNrjZJDxdXT3cw0J8vdTCA4Icoz09HNX8HV19nD08wz25WFgTUvMKU7lhdLcDHJuriHOHrqpBfnxqcUFicmpeakl8aGO5uZmlkbORsYEFQAAyyMf2g</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MAGNETRON SPRAYING MECHANISM</title><source>esp@cenet</source><creator>BEDIUKH OLEKSANDR RADIIOVYCH ; KUCHERENKO YEVHEN TROKHYMOVYCH ; KRAVCHENKO OLEKSANDR IVANOVYCH</creator><creatorcontrib>BEDIUKH OLEKSANDR RADIIOVYCH ; KUCHERENKO YEVHEN TROKHYMOVYCH ; KRAVCHENKO OLEKSANDR IVANOVYCH</creatorcontrib><description>A magnetron spraying mechanism concerns ion-plasma technology of sputtering thin films and protective coatings in making integrated circuits and electronic devices of functional diagnostics. Magnetron spraying mechanism has two planar magnetic systems with targets, disposed at an angle of 60°-120° and two power supplies, which are switched in parallel to magnetic systems, one of them is of high frequency and another one is of low frequency. The technical result consists in providing possibility of obtaining films of metal semiconductor and dielectric coatings and two component coatings.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2007</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070115&DB=EPODOC&CC=UA&NR=77692C2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20070115&DB=EPODOC&CC=UA&NR=77692C2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BEDIUKH OLEKSANDR RADIIOVYCH</creatorcontrib><creatorcontrib>KUCHERENKO YEVHEN TROKHYMOVYCH</creatorcontrib><creatorcontrib>KRAVCHENKO OLEKSANDR IVANOVYCH</creatorcontrib><title>MAGNETRON SPRAYING MECHANISM</title><description>A magnetron spraying mechanism concerns ion-plasma technology of sputtering thin films and protective coatings in making integrated circuits and electronic devices of functional diagnostics. Magnetron spraying mechanism has two planar magnetic systems with targets, disposed at an angle of 60°-120° and two power supplies, which are switched in parallel to magnetic systems, one of them is of high frequency and another one is of low frequency. The technical result consists in providing possibility of obtaining films of metal semiconductor and dielectric coatings and two component coatings.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2007</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJDxdXT3cw0J8vdTCA4Icoz09HNX8HV19nD08wz25WFgTUvMKU7lhdLcDHJuriHOHrqpBfnxqcUFicmpeakl8aGO5uZmlkbORsYEFQAAyyMf2g</recordid><startdate>20070115</startdate><enddate>20070115</enddate><creator>BEDIUKH OLEKSANDR RADIIOVYCH</creator><creator>KUCHERENKO YEVHEN TROKHYMOVYCH</creator><creator>KRAVCHENKO OLEKSANDR IVANOVYCH</creator><scope>EVB</scope></search><sort><creationdate>20070115</creationdate><title>MAGNETRON SPRAYING MECHANISM</title><author>BEDIUKH OLEKSANDR RADIIOVYCH ; KUCHERENKO YEVHEN TROKHYMOVYCH ; KRAVCHENKO OLEKSANDR IVANOVYCH</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_UA77692C23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2007</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>BEDIUKH OLEKSANDR RADIIOVYCH</creatorcontrib><creatorcontrib>KUCHERENKO YEVHEN TROKHYMOVYCH</creatorcontrib><creatorcontrib>KRAVCHENKO OLEKSANDR IVANOVYCH</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BEDIUKH OLEKSANDR RADIIOVYCH</au><au>KUCHERENKO YEVHEN TROKHYMOVYCH</au><au>KRAVCHENKO OLEKSANDR IVANOVYCH</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MAGNETRON SPRAYING MECHANISM</title><date>2007-01-15</date><risdate>2007</risdate><abstract>A magnetron spraying mechanism concerns ion-plasma technology of sputtering thin films and protective coatings in making integrated circuits and electronic devices of functional diagnostics. Magnetron spraying mechanism has two planar magnetic systems with targets, disposed at an angle of 60°-120° and two power supplies, which are switched in parallel to magnetic systems, one of them is of high frequency and another one is of low frequency. The technical result consists in providing possibility of obtaining films of metal semiconductor and dielectric coatings and two component coatings.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
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| subjects | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | MAGNETRON SPRAYING MECHANISM |
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