method for producing microcrystals from the solid solution InxGa1-xAs

A method for producing microcrystals from the solid solution InxGa1-xAs includes vacuum pumping deposition chamber volume, in which substrate, the sources of indium, arsenic, gallium, transport gas are placed, and heating. HCl is used as a transport gas. Sealed quartz ampoule is used as the depositi...

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Hauptverfasser: Shuryhin Fedir Mykhailovych, Makido Olena Yuriivna, Voroshylo Halyna Ivanivna, Bolshakova Inesa Antonivna, Stetsko Roman Mykhailovych, Kost Yaroslav Yaroslavovych
Format: Patent
Sprache:eng ; rus ; ukr
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