METHOD FOR OBTAINING CHAIN PORES ON INDIUM PHOSPHIDE SURFACE BY ELECTROCHEMICAL ETCHING

A method for obtaining chain pores on indium phosphide surface (InP) comprises the treatment of monocrystal InP by electrochemical etching. Monocrystal InP (111) is treated by electrochemical etching in the solution of hydrofluoric acid as electrolyte in concentration of HF:H2O:C2H5OH=2:2:1 for 10 m...

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Hauptverfasser:	Bondarenko Viktoriia Volodymirivna, Kovachov Serhii Serhiiovych, Sychikova Yana Oleksandrivna, Lazarenko Andrii Stepanovych, Shyshkin Hennadii Oleksandrovych, Bohdanov Ihor Tymofiiovych
Format:	Patent
Sprache:	eng ; ukr
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