Threaded nozzle inserts

Threaded nozzle inserts for use in semiconductor processing tool showerheads or gas distributors are disclosed.

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Bibliographische Detailangaben
Hauptverfasser:	BUSSAN, JOHN EDWARD, CHANG, CHING-YUN, GUO, TONG-TONG, GONG, BO, KULKARNI, PRASANNA, CHITIKASE, VAMSHI KRISHNA, BATZER, RACHEL E
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	Threaded nozzle inserts for use in semiconductor processing tool showerheads or gas distributors are disclosed.