Anti-deposition object for use in vacuum environment

An anti-deposition object for use in a vacuum environment comprises a main structure and a fluorinated coating layer, wherein the fluorinated coating layer covers at least one surface of the main structure, wherein the anti-deposition object is in contact with a process material used or exhausted by a process equipment during a process in the vacuum environment, the fluorinated coating layer has a higher water droplet contact angle to the process substances than the surface of the main structure, the fluorinated coating layer has an approximate or higher hardness than the surface of the main structure, and the fluorinated coating layer has a lower roughness than the surface of the main structure. The fluorinated coating layer has a lower roughness than the surface of the main structure. The invention is used in the vacuum environment to prevent the vacuum parts from being scratched by the impact of process substances such as particles, and to achieve the effect of self-cleaning and easy cleaning, so as to red