Development processing apparatus

The utility model provides a development processing device which can quickly stop the progress of development processing under the condition that an exception occurs in a development processing procedure. A development processing apparatus that performs development of a substrate, the development pr...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	YANO, KAZUTOSHI, HIRAI, YOSHIKAZU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The utility model provides a development processing device which can quickly stop the progress of development processing under the condition that an exception occurs in a development processing procedure. A development processing apparatus that performs development of a substrate, the development processing apparatus including: a mounting portion on which the substrate is mounted; and one or moreemergency cleaning liquid nozzles which are provided separately from the normal cleaning nozzles, and which eject cleaning liquid toward the substrate on the mounting portion when an abnormality occurs in the developing processing apparatus.