Dry cleaning module

A dry cleaning module adapted to clean a substrate is provided. The dry cleaning module includes a solid cleaning device, an exhaust device, and at least one gas cleaning device. The solid cleaning device includes a frame, a rotating shaft, an annular cleaning element and a descaling element. The de...

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Bibliographische Detailangaben
Hauptverfasser:	SHEN, HSIN-MIN, CHEN, CHAOUNG, TIEN, YU-LUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A dry cleaning module adapted to clean a substrate is provided. The dry cleaning module includes a solid cleaning device, an exhaust device, and at least one gas cleaning device. The solid cleaning device includes a frame, a rotating shaft, an annular cleaning element and a descaling element. The descaling element is disposed in the frame and is located on the maximum rotation path of the annular cleaning element. The exhaust device is disposed on a top surface of the solid cleaning device. The at least one gas cleaning device includes an air inlet hole and an air outlet hole, and is adapted to provide air from the air outlet hole, wherein the rotating shaft is adapted to drive the annular cleaning element to rotate to contact the descaling element, and the exhaust device evacuates the space of the solid cleaning device at the same time.