Delivery device for solid precursor

A delivery device is provided. The distribution of carrier gas and the contact area of carrier gas and solid precursor can be increased, so that the carrier gas can deliver gas of solid precursor with stable concentration. Moreover, since the solid precursor is accommodated in packing units, residua...

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Bibliographische Detailangaben
Hauptverfasser:	CHUANG, SHUN-FA, CHEN, TSUNG-MIN, CHANG, CHUN-KO, CHIU, CHIN-I
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	A delivery device is provided. The distribution of carrier gas and the contact area of carrier gas and solid precursor can be increased, so that the carrier gas can deliver gas of solid precursor with stable concentration. Moreover, since the solid precursor is accommodated in packing units, residual of the solid precursor in a container can be decreased.